Error running Apollo example (on latest version)

{"errors":[{"message":"Error loading package.json at /home/tom/Code/code9/node/test-fp-ls/node_modules/.deno/@apollo+utils.createhash@2.0.1/node_modules/sha.js/sha.js/package.json. Not a directory (os error 20)","extensions":{"code":"INTERNAL_SERVER_ERROR","stacktrace":["Error: Error loading package.json at /home/tom/Code/code9/node/test-fp-ls/node_modules/.deno/@apollo+utils.createhash@2.0.1/node_modules/sha.js/sha.js/package.json. Not a directory (os error 20)","    at resolveExports (internal:deno_node_loading/02_require.js:318:14)","    at Function.Module._findPath (internal:deno_node_loading/02_require.js:357:31)","    at Function.Module._resolveFilename (internal:deno_node_loading/02_require.js:618:27)","    at Function.Module._load (internal:deno_node_loading/02_require.js:467:27)","    at Module.require (internal:deno_node_loading/02_require.js:678:19)","    at require (internal:deno_node_loading/02_require.js:818:16)","    at createHash (file:///home/tom/Code/code9/node/test-fp-ls/node_modules/.deno/@apollo+utils.createhash@2.0.1/node_modules/@apollo/utils.createhash/dist/index.js:9:12)","    at Object.html (file:///home/tom/Code/code9/node/test-fp-ls/node_modules/.deno/@apollo+server@4.9.3/node_modules/@apollo/server/dist/esm/plugin/landingPage/default/index.js:67:29)","    at ApolloServer.executeHTTPGraphQLRequest (file:///home/tom/Code/code9/node/test-fp-ls/node_modules/.deno/@apollo+server@4.9.3/node_modules/@apollo/server/dist/esm/ApolloServer.js:480:77)"]}}]}